Relationship between structure, surface topography and tribo-mechanical behavior of Ti-N thin films elaborated at different N2 flow rates

نویسندگان

چکیده

Titanium nitride films were deposited by reactive magnetron sputtering on Si (100) wafers, glass and Ti6Al4V substrates. The film deposition was carried out in a gas mixture of Ar N2. nitrogen content varied between 0 30 % the total mixture. This variation led to formation different with microstructures. microstructure Ti-N coatings presented nanocomposites low tendency surface oxidation. From pure Ti tetragonal Ti2N cubic microstructures, showed (111) TiN plane growth that an increase lattice strain decrease grain size when increasing flow rate. water-film contact angle measurements hydrophobicity increased film. Mechanical properties measured strong dependence hardness found. under 20 N2 exhibited highest hardness, best adhesion wear resistance, lowest friction coefficient presence fiber texture.

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ژورنال

عنوان ژورنال: Thin Solid Films

سال: 2021

ISSN: ['1879-2731', '0040-6090']

DOI: https://doi.org/10.1016/j.tsf.2021.138598